发明申请
US20160184926A1 LASER ABLATION SYSTEM INCLUDING VARIABLE ENERGY BEAM TO MINIMIZE ETCH-STOP MATERIAL DAMAGE
审中-公开
包括可变能量光束在内的激光雷达系统，以最小化灭火材料损伤
- 专利标题： LASER ABLATION SYSTEM INCLUDING VARIABLE ENERGY BEAM TO MINIMIZE ETCH-STOP MATERIAL DAMAGE
- 专利标题（中）： 包括可变能量光束在内的激光雷达系统，以最小化灭火材料损伤
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申请号： US14585404申请日： 2014-12-30
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公开(公告)号： US20160184926A1公开(公告)日： 2016-06-30
- 发明人: Courtney T. Sheets , Matthew E. Souter , Brian M. Erwin , Bouwe W. Leenstra , Nicholas A. Polomoff , Christopher L. Tessler
- 申请人： SUSS MicroTec Photonic Systems Inc. , International Business Machines Corporation
- 主分类号： B23K26/06
- IPC分类号： B23K26/06 ; B23K26/362 ; B23K26/40 ; B23K26/03
摘要：
An ablation system includes an ablation tool configured to generate an energy beam to ablate an energy-sensitive material formed on at least one embedded feature of a workpiece. The ablation tool selects an initial fluence and an initial pulse rate of the energy beam to ablate a first portion of the energy-sensitive layer. The ablation tool further reduces at least one of the initial fluence and the initial pulse rate of the energy beam to ablate a second remaining portion of the energy-sensitive layer such that the embedded feature is exposed without being damaged or deformed.
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