公开(公告)号：US20160184926A1

公开(公告)日：2016-06-30

申请号：US14585404

申请日：2014-12-30

申请人： SUSS MicroTec Photonic Systems Inc. ,  International Business Machines Corporation

发明人： Courtney T. Sheets ,  Matthew E. Souter ,  Brian M. Erwin ,  Bouwe W. Leenstra ,  Nicholas A. Polomoff ,  Christopher L. Tessler

IPC分类号： B23K26/06 ,  B23K26/362 ,  B23K26/40 ,  B23K26/03

CPC分类号： B23K26/0626 ,  B23K26/0622 ,  B23K26/066 ,  B23K26/361 ,  B23K26/362 ,  B23K26/40 ,  B23K26/402

摘要： An ablation system includes an ablation tool configured to generate an energy beam to ablate an energy-sensitive material formed on at least one embedded feature of a workpiece. The ablation tool selects an initial fluence and an initial pulse rate of the energy beam to ablate a first portion of the energy-sensitive layer. The ablation tool further reduces at least one of the initial fluence and the initial pulse rate of the energy beam to ablate a second remaining portion of the energy-sensitive layer such that the embedded feature is exposed without being damaged or deformed.

摘要翻译： 消融系统包括消融工具，其被配置为产生能量束以消融形成在工件的至少一个嵌入特征上的能量敏感材料。 消融工具选择能量束的初始注量和初始脉冲速率来消融能量敏感层的第一部分。 消融工具进一步减少能量束的初始注量和初始脉冲速率中的至少一个，以消除能量敏感层的第二剩余部分，使得嵌入特征被暴露而不被损坏或变形。

公开(公告)号：US20140224860A1

公开(公告)日：2014-08-14

申请号：US13764254

申请日：2013-02-11

申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

发明人： Glen N. Biggs ,  Russell A. Budd ,  Benjamin V. Fasano ,  John J. Garant ,  Peter A. Gruber ,  John P. Karidis ,  Bouwe W. Leenstra ,  Phillip W. Palmatier ,  Kevin M. Prettyman ,  Christopher L. Tessler ,  Thomas Weiss

IPC分类号： B23K3/06

CPC分类号： B23K3/0607 ,  B23K3/0638

摘要： A fill head apparatus includes at least one chamber for holding a fluid. The chamber has an outlet for expelling the fluid. A vacuum device has an inlet for a suction device adjacent to the fluid outlet. A plurality of flexible and resilient sealing devices contact a top surface of a workpiece. The sealing devices are positioned on opposing sides of the chamber outlet and on opposing sides of the vacuum device inlet, such that the sealing devices create at least a partial seal around a cavity defined by the workpiece and the cavity is beneath both the chamber outlet and the vacuum outlet.

摘要翻译： 填充头装置包括用于保持流体的至少一个室。 该腔室具有排出流体的出口。 真空装置具有用于与流体出口相邻的抽吸装置的入口。 多个柔性和弹性密封装置接触工件的顶表面。 密封装置定位在室出口的相对侧和真空装置入口的相对侧上，使得密封装置在由工件限定的空腔周围产生至少一个局部密封，并且空腔位于室出口和 真空出口。

公开(公告)号：US09278401B2

公开(公告)日：2016-03-08

申请号：US13764254

申请日：2013-02-11

申请人： International Business Machines Corporation

发明人： Glen N. Biggs ,  Russell A. Budd ,  Benjamin V. Fasano ,  John J. Garant ,  Peter A. Gruber ,  John P. Karidis ,  Bouwe W. Leenstra ,  Phillip W. Palmatier ,  Kevin M. Prettyman ,  Christopher L. Tessler ,  Thomas Weiss

IPC分类号： B23K3/06

CPC分类号： B23K3/0607 ,  B23K3/0638

摘要： A fill head apparatus includes at least one chamber for holding a fluid. The chamber has an outlet for expelling the fluid. A vacuum device has an inlet for a suction device adjacent to the fluid outlet. A plurality of flexible and resilient sealing devices contact a top surface of a workpiece. The sealing devices are positioned on opposing sides of the chamber outlet and on opposing sides of the vacuum device inlet, such that the sealing devices create at least a partial seal around a cavity defined by the workpiece and the cavity is beneath both the chamber outlet and the vacuum outlet.

摘要翻译： 填充头装置包括用于保持流体的至少一个室。 该腔室具有排出流体的出口。 真空装置具有用于与流体出口相邻的抽吸装置的入口。 多个柔性和弹性密封装置接触工件的顶表面。 密封装置定位在室出口的相对侧和真空装置入口的相对侧上，使得密封装置在由工件限定的空腔周围产生至少一个局部密封，并且空腔位于室出口和 真空出口。