Invention Application
US20160208415A1 MAGNETIC FIELD GUIDED CRYSTAL ORIENTATION SYSTEM FOR METAL CONDUCTIVITY ENHANCEMENT
审中-公开
用于金属电导率增强的磁场导向晶体定向系统
- Patent Title: MAGNETIC FIELD GUIDED CRYSTAL ORIENTATION SYSTEM FOR METAL CONDUCTIVITY ENHANCEMENT
- Patent Title (中): 用于金属电导率增强的磁场导向晶体定向系统
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Application No.: US14908505Application Date: 2014-08-19
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Publication No.: US20160208415A1Publication Date: 2016-07-21
- Inventor: Christopher Dennis Bencher , Peng Xie , Stephen Moffatt , Bruce E. Adams , Majeed A. Foad
- Applicant: APPLIED MATERIALS, INC.
- International Application: PCT/US2014/051747 WO 20140819
- Main IPC: C30B30/04
- IPC: C30B30/04 ; C30B19/08 ; C30B29/02

Abstract:
A magnetic field guided crystal orientation system, and a method of operation of a magnetic field guided crystal orientation system thereof, including: a work platform; a heating element above the work platform for selectively heating a base layer having grains on a wafer substrate where the wafer substrate is a part of a wafer on the work platform; and a magnetic assembly fixed relative to the heating element for aligning the grains of the base layer using a magnetic field of 10 Tesla or greater for formation of an interconnect having a crystal orientation of grains in the interconnect matching the crystal orientation of the grains of the base layer.
Information query
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