Invention Application
US20160237584A1 ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS 审中-公开
电镀具有减少的空气泡沫缺陷

ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS
Abstract:
A method for processing a wafer includes holding the wafer in a face-up position with a seal ring contacting the wafer on a contact circumference. A bead of liquid is applied onto the entire contact circumference, with the bead of liquid contacting the wafer and the seal ring. The wafer is then inverted into a head-down position, lowered into contact with electrolyte and plated with a conductive film. Formation of the bead of liquid helps to displace air bubbles as the wafer is immersed into the electrolyte which reduces plating defects.
Information query
Patent Agency Ranking
0/0