Invention Application
- Patent Title: ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS
- Patent Title (中): 电镀具有减少的空气泡沫缺陷
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Application No.: US14620984Application Date: 2015-02-12
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Publication No.: US20160237584A1Publication Date: 2016-08-18
- Inventor: Paul R. McHugh , Gregory J. Wilson , John L. Klocke , Randy A. Harris , Bridger Hoerner , Paul Van Valkenburg
- Applicant: APPLIED Materials, Inc.
- Main IPC: C25D5/22
- IPC: C25D5/22 ; C25D5/34 ; C25D17/00 ; C25D17/06 ; H01L21/288 ; C25D7/12

Abstract:
A method for processing a wafer includes holding the wafer in a face-up position with a seal ring contacting the wafer on a contact circumference. A bead of liquid is applied onto the entire contact circumference, with the bead of liquid contacting the wafer and the seal ring. The wafer is then inverted into a head-down position, lowered into contact with electrolyte and plated with a conductive film. Formation of the bead of liquid helps to displace air bubbles as the wafer is immersed into the electrolyte which reduces plating defects.
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