发明申请
- 专利标题: REVERSED FLEXIBLE TFT BACK-PANEL BY GLASS SUBSTRATE REMOVAL
- 专利标题(中): 通过玻璃基板去除反向柔性TFT背板
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申请号: US14635865申请日: 2015-03-02
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公开(公告)号: US20160260752A1公开(公告)日: 2016-09-08
- 发明人: Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
- 申请人: Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L51/05 ; H01L51/56 ; H01L29/786
摘要:
The process of fabricating a flexible TFT back-panel includes depositing etch stop material on a glass support. A matrix of contact pads, gate electrodes and gate dielectric are deposited overlying the etch stop material. Vias are formed through the dielectric in communication with each pad. A matrix of TFTs is formed by depositing and patterning metal oxide semiconductor material to form an active layer of each TFT overlying the gate electrode. Source/drain metal is deposited on the active layer and in the vias in contact with the pads, the source/drain metal defining source/drain terminals of each TFT. Passivation material is deposited in overlying relationship to the TFTs. A color filter layer is formed on the passivation material and a flexible plastic carrier is affixed to the color filter. The glass support member and the etch stop material are then etched away to expose a surface of each of the pads.
公开/授权文献
- US09608017B2 Reversed flexible TFT back-panel by glass substrate removal 公开/授权日:2017-03-28
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