Invention Application
- Patent Title: PLATING APPARATUS
- Patent Title (中): 电镀设备
-
Application No.: US15179835Application Date: 2016-06-10
-
Publication No.: US20160281254A1Publication Date: 2016-09-29
- Inventor: Tomonori HIRAO
- Applicant: EBARA CORPORATION
- Priority: JP2013-063800 20130326; JP2013-069729 20130328
- Main IPC: C25D5/48
- IPC: C25D5/48 ; C25D17/00 ; C25D21/06 ; C25D21/04 ; B65G45/26 ; C23C18/16 ; B65G45/10 ; B65G45/22 ; B65G45/24 ; C25D17/06 ; C25D21/02

Abstract:
A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.
Public/Granted literature
- US10294576B2 Plating apparatus Public/Granted day:2019-05-21
Information query