Invention Application
US20160322198A1 Ion Source for Metal Implantation and Methods Thereof 审中-公开
金属植入物的离子源及其方法

Ion Source for Metal Implantation and Methods Thereof
Abstract:
An ion source for an implanter includes a first solid state source electrode disposed in an ion source chamber. The first solid state source electrode includes a source material coupled to a first negative potential node. A second solid state source electrode is disposed in the ion source chamber. The second solid state source electrode includes the source material coupled to a second negative potential node, and the first solid state source electrode and the second solid state source electrode are configured to produce ions to be implanted by the implanter.
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