Invention Application
US20160329481A1 BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME 审中-公开
大容量声波谐波器和滤波器,包括它们

BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME
Abstract:
A bulk acoustic wave resonator includes a resonating part comprising a first electrode, a piezoelectric layer, and a second electrode sequentially laminated, wherein the resonating part is disposed on a substrate; and a cap comprising a groove part configured to accommodate the resonating part, a frame bonded to the substrate by a bonding agent, and a permeation preventing part configured to block the bonding agent from permeating into the groove part from the frame.
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