Invention Application
- Patent Title: METHODS OF FORMING A GATE CONTACT ABOVE AN ACTIVE REGION OF A SEMICONDUCTOR DEVICE
- Patent Title (中): 在半导体器件的活性区域形成栅极接触的方法
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Application No.: US14731960Application Date: 2015-06-05
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Publication No.: US20160359009A1Publication Date: 2016-12-08
- Inventor: Ruilong Xie , Andre Labonte , Andreas Knorr
- Applicant: GLOBALFOUNDRIES Inc.
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/06 ; H01L21/02 ; H01L21/311 ; H01L21/3213 ; H01L21/28 ; H01L23/535 ; H01L29/78

Abstract:
One method disclosed herein includes, among other things, forming a gate contact opening in a layer of insulating material, wherein the gate contact opening is positioned at least partially vertically above a active region, the gate contact opening exposing a portion of at least a gate cap layer of a gate structure, performing at least one etching process to remove the gate cap layer and recess a sidewall spacer so as to thereby define a spacer cavity and expose at least an upper surface of a gate electrode within the gate contact opening, filling the spacer cavity with an insulating material while leaving the upper surface of the gate electrode exposed, and forming a conductive gate contact in the gate contact opening.
Public/Granted literature
- US09780178B2 Methods of forming a gate contact above an active region of a semiconductor device Public/Granted day:2017-10-03
Information query
IPC分类: