Invention Application
US20160362795A1 METHOD FOR FORMING CERAMIC COATING HAVING IMPROVED PLASMA RESISTANCE AND CERAMIC COATING FORMED THEREBY 审中-公开
形成具有改进的等离子体电阻和陶瓷涂层的陶瓷涂层的方法

METHOD FOR FORMING CERAMIC COATING HAVING IMPROVED PLASMA RESISTANCE AND CERAMIC COATING FORMED THEREBY
Abstract:
The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.
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