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Invention Application
US20160363491A1 PRESSURE SENSING ELEMENT HAVING AN INSULATING LAYER WITH AN INCREASED HEIGHT FROM THE SUBSTRATE TOWARDS THE OPENING 有权
具有从基板增加的高度的绝缘层的压力传感元件开启

PRESSURE SENSING ELEMENT HAVING AN INSULATING LAYER WITH AN INCREASED HEIGHT FROM THE SUBSTRATE TOWARDS THE OPENING
Abstract:
A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).
Abstract(Chinese):

压力传感元件（100）包括支撑衬底（11）; 由所述支撑基板（11）支撑的传感器电极（12）; 功能化为导电的压力感测膜（14）至少在其一部分面对传感器电极（12）; 以及保持传感器电极（12）和压力感测膜（14）彼此分开预定距离A的绝缘层（13），并且在其中形成有传感器电极（12）的开口（20） 暴露于压力感测膜（14），绝缘层（13）具有分隔开口（20）的孔壁（13b）和面对压力感测膜的孔端（顶孔端部13a） （14），并且所述绝缘层（13）从所述支撑基板（11）测量的高度朝向所述开口（20）连续地增加。

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