Invention Application
- Patent Title: DE-INTEGRATED TRENCH FORMATION FOR ADVANCED MRAM INTEGRATION
- Patent Title (中): 用于高级MRAM集成的集成化梯度形成
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Application No.: US14735006Application Date: 2015-06-09
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Publication No.: US20160365505A1Publication Date: 2016-12-15
- Inventor: Yu LU , Wei-Chuan CHEN , Seung Hyuk KANG
- Applicant: QUALCOMM Incorporated
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/10 ; H01L27/22 ; H01L43/08 ; H01L43/12

Abstract:
A semiconductor device may include a magnetoresistive random-access memory (MRAM) trench having a first conductive barrier liner and a second conductive barrier liner. The MRAM trench may land on a hard mask of a magnetic tunnel junction (MTJ) within an MTJ region of the semiconductor device. The semiconductor device may also include a logic trench having the first conductive barrier liner. The semiconductor device may further include a logic via having the first conductive barrier liner. The logic via may land on a first portion of a conductive interconnect (Mx) within a logic region of the semiconductor device.
Public/Granted literature
- US09614143B2 De-integrated trench formation for advanced MRAM integration Public/Granted day:2017-04-04
Information query
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