Invention Application
- Patent Title: PULSED LIGHT BEAM SPECTRAL FEATURE CONTROL
- Patent Title (中): 脉冲光束光谱特征控制
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Application No.: US14794508Application Date: 2015-07-08
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Publication No.: US20160380402A1Publication Date: 2016-12-29
- Inventor: Kevin M. O'Brien , Rahul Ahlawat
- Applicant: Cymer, LLC
- Main IPC: H01S3/00
- IPC: H01S3/00 ; G03F7/20 ; H01S3/11 ; G02B26/00 ; G01B11/02 ; H01S3/22

Abstract:
A system includes a first actuation module coupled to a first actuatable apparatus of an optical source, the first actuatable apparatus being altered by the first actuation module to adjust the spectral feature of the pulsed light beam; a second actuation module coupled to a second actuatable apparatus of the optical source, the second actuatable apparatus being altered by the second actuation module to adjust the spectral feature of the pulsed light beam; and a control system configured to receive an indication regarding the operating state of the first actuatable apparatus; and send a signal to the second actuation module to adjust the spectral feature of the pulsed light beam to either: prevent the first actuatable apparatus from saturating based on the operating state of the first actuatable apparatus, or desaturate the first actuatable apparatus if the first actuatable apparatus is saturated.
Public/Granted literature
- US09785050B2 Pulsed light beam spectral feature control Public/Granted day:2017-10-10
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