发明申请
US20170009339A1 GAS BARRIER FILM AND METHOD OF MANUFACTURING GAS BARRIER FILM 有权
气体阻隔膜和制造气体阻隔膜的方法

GAS BARRIER FILM AND METHOD OF MANUFACTURING GAS BARRIER FILM
摘要:
A gas barrier film includes a substrate film and an inorganic layer, in which the inorganic layer includes Si, N, H, and O, the inorganic layer includes a uniform region having a thickness of more than 5 nm at the center in a thickness direction, in the uniform region, a ratio of Si, N, H, and O is uniform and an O proportion is low, and either or both interface-contact regions of the inorganic layer are oxygen-containing regions in which the O proportion represented by the expression “O Proportion: (Number of O/Total Number of Si, N, and O)×100%” increases in a direction from the uniform region side to an interface and in which a variation of the 0 proportion per unit thickness is 2%/nm to 8%/nm.
信息查询
0/0