PIEZOELECTRIC ELEMENT AND ACTUATOR
    1.
    发明公开

    公开(公告)号:US20240114797A1

    公开(公告)日:2024-04-04

    申请号:US18454073

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate, a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode, in which both the first piezoelectric film and the second piezoelectric film have spontaneous polarizations aligned in a film thickness direction and directions of the spontaneous polarizations are the same, and in a case where in a hysteresis curve of one piezoelectric film, a coercive voltage Vcf+, a coercive voltage Vcf−, |Vcf+−Vcf−|=ΔVcf, and the larger of an absolute value of Vcf+ and an absolute value of Vcf− is denoted by Vcf, and in a hysteresis curve of the other piezoelectric film, a coercive voltage Vcr+, a coercive voltage Vcr−, |Vcr+−Vcr−|=ΔVcr, and the larger of an absolute value of Vcr+ and an absolute value Vcr− is denoted by Vcr, ΔVcr

    PIEZOELECTRIC ELEMENT AND ACTUATOR
    2.
    发明公开

    公开(公告)号:US20240114796A1

    公开(公告)日:2024-04-04

    申请号:US18454072

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb Zr, Ti, and M, as a main component, Pb composition ratios in the perovskite-type oxides contained in the first piezoelectric film and the second piezoelectric film are different from each other, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.

    PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD FOR PIEZOELECTRIC ELEMENT

    公开(公告)号:US20240023453A1

    公开(公告)日:2024-01-18

    申请号:US18472170

    申请日:2023-09-21

    CPC classification number: H10N30/877 H10N30/06

    Abstract: The piezoelectric element is a piezoelectric element including, on a substrate in the following order, a lower electrode layer, a piezoelectric film containing a perovskite-type oxide as a main component, and an upper electrode layer, in which at least a region of the upper electrode layer closest to a side of the piezoelectric film is composed of an oxide conductive layer containing In, and regarding an interface region between the piezoelectric film and the oxide conductive layer of the upper electrode layer, in an intensity profile of binding energy, which is acquired by an X-ray photoelectron spectroscopy measurement, a peak intensity ratio γ/α satisfies γ/α≤0.25, wherein a is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to oxygen, and γ is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to an OH group.

    METHOD FOR PRODUCING TRANSPARENT OPTICAL FILM AND METHOD FOR PRODUCING TRANSPARENT MULTILAYER FILM

    公开(公告)号:US20200002804A1

    公开(公告)日:2020-01-02

    申请号:US16568905

    申请日:2019-09-12

    Abstract: This method for producing a transparent optical film includes a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer formed of a high standard electrode potential metal having a higher standard electrode potential than that of silver by vacuum deposition, and an alloying step of forming a silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50° C. or higher and 400° C. or lower.

    PIEZOELECTRIC ELEMENT AND ACTUATOR
    7.
    发明公开

    公开(公告)号:US20240114801A1

    公开(公告)日:2024-04-04

    申请号:US18458127

    申请日:2023-08-29

    CPC classification number: H10N30/8554 H10N30/06 H10N30/2047 H10N30/883

    Abstract: A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb at an A site and containing Zr, Ti, and M at a B site as a main component, an M composition ratio in the first piezoelectric film is different from an M composition ratio in the second piezoelectric film, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.

    PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT

    公开(公告)号:US20240023452A1

    公开(公告)日:2024-01-18

    申请号:US18338351

    申请日:2023-06-21

    CPC classification number: H10N30/8554 H10N30/10516

    Abstract: Regarding the piezoelectric laminate and the piezoelectric element, in the piezoelectric laminate including, on a substrate, a lower electrode layer and a piezoelectric film in this order, a seed layer consisting of a conductive oxide is provided between the lower electrode layer and the piezoelectric film, and the piezoelectric film contains a perovskite-type oxide represented by General Formula I,


    Pb1-y2+αAy2{(Ti,Zr)1-x-y1NbxB1y1}O3  General Formula I



    here, A is an A site element, where it is one or more elements including at least La, B1 is a B site element, which is one or more divalent or trivalent elements, O is an oxygen element, and x, y1, y2, and α satisfy 0.05

    PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT

    公开(公告)号:US20230098590A1

    公开(公告)日:2023-03-30

    申请号:US17894863

    申请日:2022-08-24

    Abstract: A piezoelectric laminate and a piezoelectric element have, on a substrate in the following order, a lower electrode layer and a piezoelectric film containing a perovskite-type oxide. The lower electrode layer includes a second layer arranged in a state of being in contact with the piezoelectric film and includes a first layer arranged on a side of the second layer from the substrate, where the first layer contains one or more of W, Mo, Nb, and Ta, as a main component, and the second layer contains Ir as a main component, where the thickness of the second layer is 50 nm or less.

    METHOD OF PRODUCING FILM
    10.
    发明申请

    公开(公告)号:US20190173013A1

    公开(公告)日:2019-06-06

    申请号:US16270289

    申请日:2019-02-07

    Abstract: Provided is a method of producing a high-quality film having a thin film and high uniformity in film thickness or the like. The method of producing a film includes supplying a raw material solution containing a solvent and a material that forms a film onto a substrate and drying the solvent to form the film on the substrate. A coating blade holding the raw material solution on the substrate is used, and the coating blade has a facing surface which faces a surface of the substrate and at least one side surface which is provided in the periphery of the facing surface and is in contact with the raw material solution. The solvent of the raw material solution is dried along a specific direction to form the film.

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