Invention Application
- Patent Title: DRY-REMOVABLE PROTECTIVE COATINGS
- Patent Title (中): 可干式保护涂料
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Application No.: US15295952Application Date: 2016-10-17
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Publication No.: US20170033069A1Publication Date: 2017-02-02
- Inventor: Mihir A. Oka , Edward R. PRACK , Dingying XU , Saikumar JAYARAMAN
- Applicant: Intel Corporation
- Main IPC: H01L23/00
- IPC: H01L23/00 ; C09D5/20 ; C09D7/12 ; H01L21/02 ; H01L21/311

Abstract:
Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.
Information query
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