Invention Application
- Patent Title: SEMICONDUCTOR STRUCTURE INCLUDING A NONVOLATILE MEMORY CELL AND METHOD FOR THE FORMATION THEREOF
- Patent Title (中): 包含非易失性存储单元的半导体结构及其形成方法
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Application No.: US14918048Application Date: 2015-10-20
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Publication No.: US20170047336A1Publication Date: 2017-02-16
- Inventor: Alban Zaka , Sven Beyer , Tom Herrmann , El Mehdi Bazizi
- Applicant: GLOBALFOUNDRIES Inc.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L21/28

Abstract:
A semiconductor structure includes a nonvolatile memory cell including a source region, a channel region and a drain region that are provided in a semiconductor material. The channel region includes a first portion adjacent the source region and a second portion between the first portion of the channel region and the drain region. An electrically insulating floating gate is provided over the first portion of the channel region. The nonvolatile memory cell further includes a select gate and a control gate. The first portion of the select gate is provided over the second portion of the channel region. The second portion of the select gate is provided over a portion of the floating gate that is adjacent to the first portion of the select gate. The control gate is provided over the floating gate and adjacent to the second portion of the select gate.
Public/Granted literature
- US09711513B2 Semiconductor structure including a nonvolatile memory cell and method for the formation thereof Public/Granted day:2017-07-18
Information query
IPC分类: