Invention Application
US20170069596A1 MULTI-DEVICE FLEXIBLE ELECTRONICS SYSTEM ON A CHIP (SOC) PROCESS INTEGRATION 审中-公开
多芯片柔性电子系统在芯片(SOC)工艺集成

MULTI-DEVICE FLEXIBLE ELECTRONICS SYSTEM ON A CHIP (SOC) PROCESS INTEGRATION
Abstract:
Embodiments of the present disclosure describe multi-device flexible systems on a chip (SOCs) and methods for making such SOCs. A multi-material stack may be processed sequentially to form multiple integrated circuit (IC) devices in a single flexible SOC. By forming the IC devices from a single stack, it is possible to form contacts for multiple devices through a single metallization process and for those contacts to be located in a common back-plane of the SOC. Stack layers may be ordered and processed according to processing temperature, such that higher temperature processes are performed earlier. In this manner, intervening layers of the stack may shield some stack layers from elevated processing temperatures associated with processing upper layers of the stack. Other embodiments may be described and/or claimed.
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