Invention Application
- Patent Title: Substrate Holder Having Integrated Temperature Measurement Electrical Devices
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Application No.: US14874991Application Date: 2015-10-05
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Publication No.: US20170098564A1Publication Date: 2017-04-06
- Inventor: Eric Pape , Darrell Ehrlich , Mike Jing
- Applicant: Lam Research Corporation
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01K7/00 ; H01L21/673
Abstract:
A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
Public/Granted literature
- US10186437B2 Substrate holder having integrated temperature measurement electrical devices Public/Granted day:2019-01-22
Information query
IPC分类:
