公开(公告)号：US20190148190A1

公开(公告)日：2019-05-16

申请号：US16247509

申请日：2019-01-14

Applicant: Lam Research Corporation

Inventor： Eric Pape ,  Darrell Ehrlich ,  Mike Jing

IPC: H01L21/67 ,  G01K1/14 ,  G01K1/02 ,  H01L21/683 ,  G01K7/00 ,  H01L21/673

Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.

公开(公告)号：US20170098564A1

公开(公告)日：2017-04-06

申请号：US14874991

申请日：2015-10-05

Applicant: Lam Research Corporation

Inventor： Eric Pape ,  Darrell Ehrlich ,  Mike Jing

IPC: H01L21/67 ,  G01K7/00 ,  H01L21/673

CPC classification number: H01L21/67248 ,  G01K1/026 ,  G01K1/14 ,  G01K7/00 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67346 ,  H01L21/6833

Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.

公开(公告)号：US10978323B2

公开(公告)日：2021-04-13

申请号：US16247509

申请日：2019-01-14

Applicant: Lam Research Corporation

Inventor： Eric Pape ,  Darrell Ehrlich ,  Mike Jing

IPC: G01K7/00 ,  G01K1/14 ,  H01L21/67 ,  H01L21/683 ,  G01K1/02 ,  H01L21/673

Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.

公开(公告)号：US10186437B2

公开(公告)日：2019-01-22

申请号：US14874991

申请日：2015-10-05

Applicant: Lam Research Corporation

Inventor： Eric Pape ,  Darrell Ehrlich ,  Mike Jing

IPC: H01L21/67 ,  G01K7/00 ,  H01L21/673 ,  H01L21/683 ,  G01K1/02 ,  G01K1/14

Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.