Invention Application
- Patent Title: METHOD OF PRODUCING LAYER STRUCTURE, AND METHOD OF FORMING PATTERNS
-
Application No.: US15264654Application Date: 2016-09-14
-
Publication No.: US20170115572A1Publication Date: 2017-04-27
- Inventor: Seulgi JEONG , Minsoo KIM , Sunghwan KIM , Hyunji SONG , Sunhae KANG , Youngmin KIM , Yoona KIM , Jinhyung KIM , Younhee NAM , Jaeyeol BAEK , Byeri YOON , Chungheon LEE , Seunghee HONG , Sunmin HWANG
- Applicant: SAMSUNG SDI CO., LTD.
- Priority: KR10-2015-0148200 20151023
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/09 ; G03F7/40 ; G03F7/20 ; G03F7/32

Abstract:
A method of producing a layer structure and a method of forming a pattern, the method of producing a layer structure including coating a first composition on a substrate that has a pattern thereon; curing the coated first composition to form a first organic layer; applying a liquid material to the first organic layer to remove a part of the first organic layer; and coating a second composition on remaining parts of the first organic layer; and curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer: wherein the first composition and the second composition each independently include a solvent, and a polymer including a structural unit represented by Chemical Formula 1, *A1-B1*. [Chemical Formula 1]
Public/Granted literature
- US10663863B2 Method of producing layer structure, and method of forming patterns Public/Granted day:2020-05-26
Information query
IPC分类: