Invention Application
- Patent Title: PIEZOELECTRIC ELEMENT, ULTRASONIC PROBE, ULTRASONIC MEASUREMENT DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
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Application No.: US15340920Application Date: 2016-11-01
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Publication No.: US20170119350A1Publication Date: 2017-05-04
- Inventor: Sayaka YAMASAKI , Hiroaki TAMURA
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2015-215987 20151102
- Main IPC: A61B8/00
- IPC: A61B8/00 ; H01L41/08 ; H01L41/083 ; B06B1/06 ; H01L41/312 ; H01L41/29 ; H01L41/187 ; H01L41/04 ; H01L41/257

Abstract:
A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Poisson's ratio and orientation with a relatively low Poisson's ratio (hereinafter, referred to as “low Poisson's ratio orientation”) as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Poisson's ratio orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as “high expansion and contraction direction”) and a direction where a degree thereof is relatively low.
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