公开(公告)号：US20180339514A1

公开(公告)日：2018-11-29

申请号：US15987255

申请日：2018-05-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiroaki TAMURA ,  Sayaka YAMASAKI

IPC: B41J2/14

Abstract: There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The diaphragm has a vibration region that overlaps the pressure chamber in plan view. The piezoelectric element overlaps the vibration region in plan view. The diaphragm has a crystal plane {110} of a single crystal silicon base, or a crystal plane of a single crystal silicon base of which a Young's modulus and a Poisson's ratio vary according to a crystal orientation.

公开(公告)号：US20180339515A1

公开(公告)日：2018-11-29

申请号：US15988971

申请日：2018-05-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: B41J2/14 ,  H01L41/09

Abstract: There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The diaphragm has a crystal plane of an anisotropic single crystal silicon base of which a Young's modulus varies according to a direction in the crystal plane. In a vibration region of the diaphragm, which overlaps the pressure chamber in plan view, a first Young's modulus in a first direction, out of Young's modulus in the crystal plane, is higher than a second Young's modulus in the crystal plane in a second direction intersecting the first direction. A width of the piezoelectric element in the first direction is larger than a width of the piezoelectric element in the second direction.

公开(公告)号：US20170119351A1

公开(公告)日：2017-05-04

申请号：US15341154

申请日：2016-11-02

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: A61B8/00 ,  H01L41/08 ,  H01L41/187 ,  H01L41/27 ,  B06B1/06 ,  A61B8/14 ,  H01L41/113

CPC classification number: A61B8/4494 ,  A61B8/0891 ,  A61B8/14 ,  A61B8/42 ,  A61B8/4427 ,  A61B8/4444 ,  A61B8/467 ,  B06B1/0607 ,  B06B1/0644 ,  H01L41/0805 ,  H01L41/081 ,  H01L41/0933 ,  H01L41/1132 ,  H01L41/1876 ,  H01L41/27 ,  H01L41/312

Abstract: A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Young's modulus and orientation with a relatively low Young's modulus (hereinafter, referred to as “low Young's modulus orientation”) as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Young's modulus orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as “high expansion and contraction direction”) and a direction where a degree thereof is relatively low.

公开(公告)号：US20240326426A1

公开(公告)日：2024-10-03

申请号：US18621306

申请日：2024-03-29

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiroaki TAMURA

IPC: B41J2/14

CPC classification number: B41J2/14233 ,  B41J2002/14258

Abstract: A liquid ejecting head includes a piezoelectric element, a diaphragm, a reinforcing film, and a pressure chamber substrate. The reinforcing film is formed along a first direction, overlaps a boundary between the partition wall and the pressure chamber, and satisfies Y1>Y2 and 0

公开(公告)号：US20180342665A1

公开(公告)日：2018-11-29

申请号：US15991451

申请日：2018-05-29

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: H01L41/083 ,  B41J2/045 ,  B41J2/14 ,  H01L41/09 ,  H01L41/047 ,  H01L41/053

Abstract: There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The diaphragm has a crystal plane of an anisotropic single crystal silicon base of which a Poisson's ratio varies according to a direction in the crystal plane. In a vibration region of the diaphragm, which overlaps the pressure chamber in plan view, the Poisson's ratio of the diaphragm in a short axis direction of the smallest rectangle, which includes the vibration region, is included in a range of a minimum value of the Poisson's ratio in the crystal plane inclusive to an average value of the Poisson's ratios in the crystal plane exclusive.

公开(公告)号：US20180339516A1

公开(公告)日：2018-11-29

申请号：US15988992

申请日：2018-05-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiroaki TAMURA ,  Sayaka YAMASAKI

IPC: B41J2/14 ,  H01L41/09

Abstract: There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The piezoelectric element is disposed on the diaphragm so as to overlap an inner periphery of the pressure chamber in plan view, and has an inner edge on a center side of the pressure chamber with the inner periphery of the pressure chamber being sandwiched within the piezoelectric element in plan view. A shape of the inner edge of the piezoelectric element is such that in the smallest first rectangle, which includes the inner edge in plan view.

公开(公告)号：US20180339513A1

公开(公告)日：2018-11-29

申请号：US15987179

申请日：2018-05-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: B41J2/14 ,  H01L41/09

Abstract: There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The diaphragm has a crystal plane of an anisotropic single crystal silicon base of which a Poisson's ratio varies according to a direction in the crystal plane. In a vibration region of the diaphragm, which overlaps the pressure chamber in plan view, the Poisson's ratio of the diaphragm in a short axis direction of the smallest rectangle, which includes the vibration region, is included in a range of an average value of the Poisson's ratios in the crystal plane exclusive to a maximum value of the Poisson's ratio in the crystal plane inclusive.

公开(公告)号：US20170143308A1

公开(公告)日：2017-05-25

申请号：US15360822

申请日：2016-11-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: A61B8/00 ,  A61B8/14 ,  H01L41/312 ,  H01L41/338 ,  H01L41/09 ,  H01L41/113

CPC classification number: A61B8/4494 ,  A61B8/0891 ,  A61B8/14 ,  A61B8/4427 ,  A61B8/4444 ,  B06B1/0629 ,  H01L41/081 ,  H01L41/09 ,  H01L41/0933 ,  H01L41/094 ,  H01L41/113 ,  H01L41/31 ,  H01L41/312 ,  H01L41/338

Abstract: A piezoelectric element, in which a piezoelectric body, and a vibrating plate having [111]-oriented single crystal silicon as a vibrating material are laminated is provided. In addition, a manufacturing method of a piezoelectric element including: cutting out a vibrating material to be used in the vibrating plate from a [111]-oriented single crystal silicon wafer; and laminating a piezoelectric body and the vibrating plate is provided.

公开(公告)号：US20170119350A1

公开(公告)日：2017-05-04

申请号：US15340920

申请日：2016-11-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Sayaka YAMASAKI ,  Hiroaki TAMURA

IPC: A61B8/00 ,  H01L41/08 ,  H01L41/083 ,  B06B1/06 ,  H01L41/312 ,  H01L41/29 ,  H01L41/187 ,  H01L41/04 ,  H01L41/257

CPC classification number: A61B8/4494 ,  A61B8/4444 ,  B06B1/06 ,  B06B1/0607 ,  G01P15/09 ,  G01P15/0922 ,  H01L41/04 ,  H01L41/081 ,  H01L41/0825 ,  H01L41/083 ,  H01L41/1136 ,  H01L41/1876 ,  H01L41/257 ,  H01L41/29 ,  H01L41/312 ,  H02N2/186

Abstract: A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Poisson's ratio and orientation with a relatively low Poisson's ratio (hereinafter, referred to as “low Poisson's ratio orientation”) as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Poisson's ratio orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as “high expansion and contraction direction”) and a direction where a degree thereof is relatively low.