Invention Application
- Patent Title: THERMAL CHEMICAL VAPOR DEPOSITION SPLIT-FUNCTIONALIZATION PROCESS, PRODUCT, AND COATING
-
Application No.: US14933295Application Date: 2015-11-05
-
Publication No.: US20170130334A1Publication Date: 2017-05-11
- Inventor: Min YUAN , Paul H. SILVIS , David A. SMITH , James B. MATTZELA
- Applicant: SILCOTEK CORP.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C04B41/52 ; C04B41/45 ; C23C16/56

Abstract:
Thermal chemical vapor deposition split-functionalizing processes, coatings, and products are disclosed. The thermal chemical vapor deposition split-functionalizing process includes positioning an article within an enclosed chamber, functionalizing the article within a first temperature range for a first period of time, and then further functionalizing the article within a second temperature range for a second period of time. The thermal chemical vapor deposition split-functionalized product includes a functionalization formed by functionalizing within a first temperature range for a first period of time and a further functionalization formed by further functionalizing within a second temperature range for a second period of time.
Information query
IPC分类: