Invention Application
- Patent Title: Method and Device for Testing Samples by Means of an Electron or Ion Beam Microscope
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Application No.: US15257667Application Date: 2016-09-06
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Publication No.: US20170154754A1Publication Date: 2017-06-01
- Inventor: Tim Dahmen , Niels de Jonge
- Applicant: FEI Company
- Priority: DE102015114843.9 20150904
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/10 ; H01J37/28 ; H01J37/20
Abstract:
The disclosed subject matter relates to testing a sample by means of a particle beam microscope in which the sample is scanned in a point-wise manner by a focused beam of charged particles thereby generating imaging signals. The particle beam dose applied per scanning point is changed during scanning.
Public/Granted literature
- US10319559B2 Method and device for testing samples by means of an electron or ion beam microscope Public/Granted day:2019-06-11
Information query
