Invention Application
- Patent Title: SUSCEPTOR AND METHOD FOR MANUFACTURING SAME
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Application No.: US15321421Application Date: 2015-06-01
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Publication No.: US20170162425A1Publication Date: 2017-06-08
- Inventor: Masato Shinohara , Yoshihisa Abe , Satoru Nogami
- Applicant: TOYO TANSO CO., LTD.
- Applicant Address: JP Osaka-city, Osaka
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka-city, Osaka
- Priority: JP2014-128957 20140624
- International Application: PCT/JP2015/065763 WO 20150601
- Main IPC: H01L21/687
- IPC: H01L21/687 ; C23C16/06 ; C23C8/20 ; C23C16/56 ; C23C16/04 ; C23C16/32

Abstract:
Provided are a susceptor that, in forming a thin film on a wafer, can reduce impurities or the like adhering to the wafer and a method for manufacturing the same. A susceptor includes a base material (10) with a recess (11), a tantalum carbide layer (22) formed directly on a bottom surface (11a) and a side surface (11b) of the recess (11), and a silicon carbide layer (20) formed on a surface of the base material (10) except for the recess (11).
Public/Granted literature
- US10522386B2 Susceptor and method for manufacturing same Public/Granted day:2019-12-31
Information query
IPC分类: