Invention Application
- Patent Title: POLISHING COMPOSITION
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Application No.: US15129836Application Date: 2015-03-30
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Publication No.: US20170174940A1Publication Date: 2017-06-22
- Inventor: Masashi TERAMOTO , Tatsuya NAKAUCHI , Noriaki SUGITA , Shinichi HABA , Akiko MIYAMOTO
- Applicant: NITTA HAAS INCORPORATED
- Applicant Address: JP Osaka
- Assignee: Nitta Haas Incorporated
- Current Assignee: Nitta Haas Incorporated
- Current Assignee Address: JP Osaka
- Priority: JP2014-073436 20140331
- International Application: PCT/JP2015/059923 WO 20150330
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/02

Abstract:
Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the mass ratio of the hydroxyethyl cellulose to the abrasive grains is 0.0075 or more and 0.025 or less.
Public/Granted literature
- US10077380B2 Polishing composition Public/Granted day:2018-09-18
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