- 专利标题: LIGHT SENSING DEVICE AND FABRICATING METHOD THEREOF
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申请号: US15084494申请日: 2016-03-30
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公开(公告)号: US20170186786A1公开(公告)日: 2017-06-29
- 发明人: Feng-Chia Hsu , Yu-Sheng Lin , Chun-Yin Tsai , Sheng-Ren Chiu
- 申请人: Industrial Technology Research Institute
- 优先权: TW104143693 20151225
- 主分类号: H01L27/144
- IPC分类号: H01L27/144 ; H01L23/522 ; H01L23/532 ; H01L31/18 ; H01L31/024 ; H01L31/02 ; H01L31/0232 ; H01L23/528 ; H01L31/0216
摘要:
A light sensing device includes a substrate, a semiconductor device layer, a metal and insulation material stacked structure, and a light absorption layer. The substrate has a recessed portion. The semiconductor device layer is located on the substrate. The metal and insulation material stacked structure is located on the semiconductor device layer and includes a first interconnect structure, a second interconnect structure surrounding the first interconnect structure, and a device conductive line. The light absorption layer is located on the metal and insulation material stacked structure. The first interconnect structure is located between the light absorption layer and the semiconductor device layer, such that the light absorption layer and the semiconductor device layer located at different levels can be connected to each other and exchange heat.
公开/授权文献
- US09966394B2 Light sensing device and fabricating method thereof 公开/授权日:2018-05-08
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