- 专利标题: DIE WITH INTEGRATED MICROPHONE DEVICE USING THROUGH-SILICON VIAS (TSVs)
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申请号: US15502495申请日: 2014-09-17
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公开(公告)号: US20170245035A1公开(公告)日: 2017-08-24
- 发明人: Kevin J. Lee , Ruchir Saraswat , Uwe Zillmann , Valluri Bob Rao , Tor Lund-Larsen , Nicholas P. Cowley
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 国际申请: PCT/US2014/056133 WO 20140917
- 主分类号: H04R1/04
- IPC分类号: H04R1/04 ; H01L23/48 ; H04R19/04 ; B81C1/00 ; H04R1/40 ; H04R19/00 ; B81B7/02 ; H01L21/768
摘要:
Embodiments of the present disclosure describe a die with integrated microphone device using through-silicon vias (TSVs) and associated techniques and configurations. In one embodiment, an apparatus includes an apparatus comprising a semiconductor substrate having a first side and a second side disposed opposite to the first side, an interconnect layer formed on the first side of the semiconductor substrate, a through-silicon via (TSV) formed through the semiconductor substrate and configured to route electrical signals between the first side of the semiconductor substrate and the second side of the semiconductor substrate, and a microphone device formed on the second side of the semiconductor substrate and electrically coupled with the TSV. Other embodiments may be described and/or claimed.
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