Invention Application
- Patent Title: PHOTODETECTOR AND METHODS OF MANUFACTURE
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Application No.: US15594951Application Date: 2017-05-15
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Publication No.: US20170250306A1Publication Date: 2017-08-31
- Inventor: John J. ELLIS-MONAGHAN , John C.S. HALL , Marwan H. KHATER , Edward W. KIEWRA , Steven M. SHANK
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L31/20
- IPC: H01L31/20 ; H01L31/028 ; H01L31/0203 ; H01L27/146

Abstract:
Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps.
Public/Granted literature
- US09954137B2 Photodetector and methods of manufacture Public/Granted day:2018-04-24
Information query
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