- 专利标题: SEMICONDUCTOR MEMORY DEVICE
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申请号: US15227493申请日: 2016-08-03
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公开(公告)号: US20170263682A1公开(公告)日: 2017-09-14
- 发明人: Masanori KOMURA , Takeshi TAKAGI
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00 ; H01L23/528
摘要:
A semiconductor memory device according to an embodiment comprises: a semiconductor substrate which extends in first and second directions; first wiring lines which are arranged in a third direction, and which extend in the first direction; second wiring lines which are arranged in the first direction and extend in the third direction; and memory cells disposed at intersections of the first wiring lines and the second wiring lines, one of the memory cells including a first film and a second film whose permittivity is different from that of the first film which are stacked in the second direction between one of the first wiring lines and one of the second wiring lines, and the second films of two of the memory cells adjacent in the third direction being separated between the two memory cells.
公开/授权文献
- US09812507B2 Semiconductor memory device 公开/授权日:2017-11-07
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