- 专利标题: RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND, AND ACID DIFFUSION CONTROL AGENT
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申请号: US15634941申请日: 2017-06-27
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公开(公告)号: US20170293223A1公开(公告)日: 2017-10-12
- 发明人: Takashi NAGAMINE , Kotaro ENDO , Hideto NITO
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2015-198778 20151006
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C381/12 ; G03F7/039 ; G03F7/32 ; G03F7/16 ; G03F7/20 ; G03F7/38 ; C07C65/05 ; G03F7/038
摘要:
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid, and a compound (D1) represented by general formula (d1), wherein Z− represents an anion having an aromatic ring containing a hydroxybenzoic acid skeleton, provided that at least one hydrogen atom of the aromatic ring has been substituted with a halogen atom; m represents an integer of 1 or more; and Mm+ represents an organic cation having a valency of m. Z−(Mm+)1,m (d1)
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