Invention Application
- Patent Title: RESONATING MEASUREMENT SYSTEM USING IMPROVED RESOLUTION
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Application No.: US15499292Application Date: 2017-04-27
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Publication No.: US20170314973A1Publication Date: 2017-11-02
- Inventor: Luca LEONCINO , Sebastien HENTZ , Guillaume JOURDAN , Marc SANSA PERNA
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Priority: FR1653901 20160429
- Main IPC: G01D5/353
- IPC: G01D5/353

Abstract:
Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.
Public/Granted literature
- US10416003B2 Resonating measurement system using improved resolution Public/Granted day:2019-09-17
Information query
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