-
公开(公告)号：US20210132106A1
公开(公告)日：2021-05-06
申请号：US17087805
申请日：2020-11-03
Inventor： Martial DEFOORT , Marc SANSA PERNA , Sébastien HENTZ
IPC: G01P15/125 , G01P15/08
Abstract: Microelectromechanical accelerometer comprising a support (2) and a mobile portion (4) able to be vibrated, means for measuring (10) the amplitude of the vibration of said mobile portion (4) in at least one detection direction of the plane of the accelerometer. The accelerometer comprises at least one foot (6) anchored on the support (2) by a first end and fixed to the mobile portion (4) by a second end, and allowing the mobile portion (4) to vibrate at least along said at least one detection direction under the effect of an acceleration force.
-
公开(公告)号：US20170370975A1
公开(公告)日：2017-12-28
申请号：US15189967
申请日：2016-06-22
Inventor： Marc SANSA PERNA , Sébastien HENTZ , Guillaume JOURDAN
CPC classification number: G01R23/15 , B81B3/0032 , B81B2201/0271 , G01R29/26 , H03J3/12
Abstract: A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.
-
公开(公告)号：US20250137919A1
公开(公告)日：2025-05-01
申请号：US18929773
申请日：2024-10-29
Inventor： Wioletta TRZPIL , Marc SANSA PERNA
Abstract: An optomechanical system for transducing an optical phase shift movement including a mechanical sensor including a sensor element, the sensor element having an upper face extending mainly into a plane called longitudinal plane, when the system is at rest, the mechanical sensor being intended to receive an acoustic wave to vibrate the sensor element at a vibration frequency. The system moreover includes an optical detector capable of guiding a light radiation substantially parallel to the longitudinal plane, the optical detector having an evanescent field. The vibration of the sensor element modifies the evanescent field of the optical detector and the sensor element is moved along a direction called transverse direction, substantially perpendicular to the longitudinal plane when it vibrates.
-
Patent Agency Ranking
公开(公告)号：US20230096612A1
公开(公告)日：2023-03-30
申请号：US17934214
申请日：2022-09-22
Inventor： Théo MIANI , Marc SANSA PERNA
IPC: G01L1/18 , G01P15/097 , G01F1/28
Abstract: A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.
-
公开(公告)号：US20230098563A1
公开(公告)日：2023-03-30
申请号：US17952125
申请日：2022-09-23
Inventor： Houssein ELMI DAWALE , Franck BADETS , Sébastien HENTZ , Guillaume JOURDAN , Marc SANSA PERNA , Loïc SIBEUD
IPC: G01N21/17
Abstract: A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current. A control circuit is configured to forward bias, during a time window of read-out of a disc of interest, the p-n junction of a disc of interest so as to place, via a thermo-optical effect, its resonant wavelength at a working wavelength, such that an optical signal propagating through the optical waveguide associated with the disc of interest is amplitude modulated.
-
公开(公告)号：US20230072687A1
公开(公告)日：2023-03-09
申请号：US17929872
申请日：2022-09-06
Inventor： Marc SANSA PERNA , Théo MIANI , Thierry VERDOT
IPC: G01P15/097
Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ωrn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa
-
公开(公告)号：US20250140545A1
公开(公告)日：2025-05-01
申请号：US18929783
申请日：2024-10-29
Inventor： Wioletta TRZPIL , Marc SANSA PERNA
Abstract: An optomechanical system for transducing an optical intensity modulation movement including an optical detector and a mechanical sensor including a mobile mass, of which a receiving surface is intended to receive an external mechanical urging, and an excitation device. The excitation device is configured to vibrate the mobile mass along an excitation direction at at least one of its resonance frequencies. The vibration of the mobile mass is disrupted by the external mechanical urging, and modifies an evanescent field of the optical detector. The mobile mass has an interaction region facing the optical detector, as well as a second region, respectively having, projecting along a plane perpendicular to the excitation direction, an interaction surface area S111 and a second surface area S112, with S112
-
公开(公告)号：US20170314973A1
公开(公告)日：2017-11-02
申请号：US15499292
申请日：2017-04-27
Inventor： Luca LEONCINO , Sebastien HENTZ , Guillaume JOURDAN , Marc SANSA PERNA
IPC: G01D5/353
CPC classification number: G01D5/353 , G01D5/26 , G01D5/34 , G01L1/103 , G01L9/0023 , G01M11/3172 , G01N29/036 , G01N29/2418 , G01N2291/015 , G01N2291/0256 , G01N2291/0427 , G01P15/093 , G01P15/097
Abstract: Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.
-
-
-
-
-
-
-
Search Results
8
records
(took 0.016 seconds)
