公开(公告)号：US20150355221A1

公开(公告)日：2015-12-10

申请号：US14831527

申请日：2015-08-20

Applicant: Commissariat a l'energie atomique et aux energies alternatives

Inventor： Philippe ROBERT ,  Sebastien HENTZ

IPC: G01P15/12

CPC classification number: G01P15/0802 ,  G01P15/123 ,  G01P2015/0817

Abstract: An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

Abstract translation: 一种面内MEMS或NEMS检测装置，用于测量沿着包括相对于衬底悬挂的地震质量的方向引导的位移，所述抗震质量可围绕垂直于衬底平面的轴线枢转，至少一个压电应变仪机械 连接到抗震块和基底，其中压阻计的厚度低于抗震块的厚度，并且其中压阻应变计的轴线与包含枢转轴线的平面和地震的重心正交 质量和平面垂直于要测量的位移的方向。

公开(公告)号：US20150153221A1

公开(公告)日：2015-06-04

申请号：US14558314

申请日：2014-12-02

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES ,  ECOLE NATIONALE TRAVAUX PUBLICS DE L'ETAT ,  INSTITUT NATIONAL SCIENCES APPLIQUEES DE LYON ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventor： Sebastien HENTZ ,  Sebastien BAGUET ,  Regis DUFOUR ,  Claude-Henri LAMARQUE ,  Van Nghi NGUYEN

IPC: G01H13/00 ,  G01N29/36 ,  H01J49/26

CPC classification number: G01H13/00 ,  B81B2201/0214 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C99/0045 ,  G01H11/00 ,  G01N29/36 ,  G01N2291/014 ,  H01J49/26 ,  H03H9/02 ,  H03H9/02259 ,  H03H9/2457 ,  H03H2007/006 ,  H03H2009/02267

Abstract: A method is provided for detecting a perturbation with respect to an initial state, of a device comprising at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle comprising at least one electromechanical resonator with nonlinear behaviour and means for actuation and for detection of the reception signal via a transducer so as to analyse the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.

Abstract translation: 提供了一种用于检测相对于初始状态的扰动的方法，该装置包括至少一个表现出对扰动敏感的物理参数的共振机械元件，使得所述扰动修改所述谐振机械元件的谐振频率。 提供了一种用于检测包括至少一个具有非线性行为的机电谐振器的滞后周期的扰动的装置，以及用于致动的装置和用于经由换能器检测接收信号的装置，以便分析实施该方法的响应信号。 还提供了使用该装置的质量传感器和质谱仪。

公开(公告)号：US20170183221A1

公开(公告)日：2017-06-29

申请号：US15389605

申请日：2016-12-23

Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives

Inventor： Willy LUDURCZAK ,  Sebastien HENTZ

IPC: B81B7/02 ,  B81C1/00

CPC classification number: B81B7/02 ,  B81B7/04 ,  B81B2201/0214 ,  B81B2203/0307 ,  B81B2207/017 ,  B81B2207/05 ,  B81B2207/053 ,  B81B2207/07 ,  B81C1/00238 ,  B81C2201/019 ,  B81C2201/0195 ,  B81C2203/038 ,  H03H3/02

Abstract: A nanoelectronic system comprised of n microelectromechanical or nanoelectromechanical devices arranged on a connection support to electrically connect the n devices, each device with an interaction area, at least one mechanical anchor and a first terminal, a second terminal and a third terminal, the relative arrangement of the first, second and third terminals, the anchor area and the interaction area being identical or similar for the n sensors, the first terminal of each device being intended to recover a signal emitted by each representative device of the interaction area state. At least part of the devices are arranged in such a way that the geometric location of the first terminal of one of the adjacent devices is identical to the geometric location of the first terminal of said other adjacent device, the first terminals being coincident.

公开(公告)号：US20230081434A1

公开(公告)日：2023-03-16

申请号：US17791182

申请日：2021-01-08

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  UNIVERSITE PARIS CITE

Inventor： Sebastien HENTZ ,  Thomas ALAVA ,  Ivan FAVERO

IPC: G01N33/543

Abstract: A concentration sensor for at least one biological species in the blood includes a support, at least one waveguide, and an optomechanical resonator suspended from the support. The optomechanical resonator is optically coupled to the waveguide, and the optomechanical resonator is configured to vibrate in volume mode and includes at least one face extending in the plane of the sensor and configured to receive molecules of the given species. At least the face includes a functionalisation layer specific to the species, the optomechanical resonator having a smaller dimension in a direction normal to the plane of the sensor compared with the dimensions of the said face.

公开(公告)号：US20170314973A1

公开(公告)日：2017-11-02

申请号：US15499292

申请日：2017-04-27

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Luca LEONCINO ,  Sebastien HENTZ ,  Guillaume JOURDAN ,  Marc SANSA PERNA

IPC: G01D5/353

CPC classification number: G01D5/353 ,  G01D5/26 ,  G01D5/34 ,  G01L1/103 ,  G01L9/0023 ,  G01M11/3172 ,  G01N29/036 ,  G01N29/2418 ,  G01N2291/015 ,  G01N2291/0256 ,  G01N2291/0427 ,  G01P15/093 ,  G01P15/097

Abstract: Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.