Invention Application
- Patent Title: TRANSFORMER, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD
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Application No.: US15494131Application Date: 2017-04-21
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Publication No.: US20170316948A1Publication Date: 2017-11-02
- Inventor: Yohei YAMAZAWA
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2016-089389 20160427
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01L21/67 ; H01F38/18 ; H03H7/00 ; H01F38/14
Abstract:
A transformer includes: a rotary shaft configured to rotate about a central axis of the rotary shaft as a rotational axis; a primary-side first coil configured to extend around a first axis perpendicular to the central axis; a secondary-side second coil configured to extend around a second axis and supported by the rotary shaft, the second axis being perpendicular to the rotational axis in an area surrounded by the first coil; and a secondary-side third coil configured to extend around a third axis and supported by the rotary shaft, the third axis being perpendicular to the rotational axis and forming a predetermined angle with the second axis in the area.
Public/Granted literature
- US10381197B2 Transformer, plasma processing apparatus, and plasma processing method Public/Granted day:2019-08-13
Information query
IPC分类:
