Invention Application
- Patent Title: SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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Application No.: US15603227Application Date: 2017-05-23
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Publication No.: US20170345686A1Publication Date: 2017-11-30
- Inventor: KIHOON CHOI , JINKYU KIM , YOON JONG JU , MIN SUNG HAN , BYUNG MAN KANG
- Applicant: SEMES CO., LTD.
- Priority: KR10-2016-0065854 20160527
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B5/00 ; B08B17/02 ; H01L21/02

Abstract:
Disclosed are a liquid treating apparatus and a liquid treating method. The liquid treating apparatus includes a chamber that provides a space for processing a substrate, a support unit that is provided in the chamber to support the substrate, an ejection unit that has a nozzle for supplying a cleaning medium to the substrate supported by the support unit, and an auxiliary ejection unit that has an auxiliary nozzle for supplying a contamination prevention liquid to the substrate supported by the support unit.
Information query
IPC分类: