Invention Application
- Patent Title: SEMICONDUCTOR CHIPS HAVING THROUGH SILICON VIAS AND RELATED FABRICATION METHODS AND SEMICONDUCTOR PACKAGES
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Application No.: US15638551Application Date: 2017-06-30
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Publication No.: US20170345713A1Publication Date: 2017-11-30
- Inventor: Jin-ho Chun , Byung-lyul PARK , Hyun-soo CHUNG , Gil-heyun CHOI , Son-kwan HWANG
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2012-0036798 20120409
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/00 ; H01L25/065 ; H01L23/48 ; H01L23/544 ; H01L23/31

Abstract:
A semiconductor chip including through silicon vias (TSVs), wherein the TSVs may be prevented from bending and the method of fabricating the semiconductor chip may be simplified, and a method of fabricating the semiconductor chip. The semiconductor chip includes a silicon substrate having a first surface and a second surface; a plurality of TSVs which penetrate the silicon substrate and protrude above the second surface of the silicon substrate; a polymer pattern layer which is formed on the second surface of the silicon substrate, surrounds side surfaces of the protruding portion of each of the TSVs, and comprises a flat first portion and a second portion protruding above the first portion; and a plated pad which is formed on the polymer pattern layer and covers a portion of each of the TSVs exposed from the polymer pattern layer.
Information query
IPC分类: