- 专利标题: Logic Chip Including Embedded Magnetic Tunnel Junctions
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申请号: US15596650申请日: 2017-05-16
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公开(公告)号: US20170358740A1公开(公告)日: 2017-12-14
- 发明人: Kevin J. Lee , Tahir Ghani , Joseph M. Steigerwald , John H. Epple , Yih Wang
- 申请人: Intel Corporation
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L27/22 ; H01L43/08
摘要:
An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) that has an upper MTJ layer, a lower MTJ layer, and a tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. Other embodiments are described herein.
公开/授权文献
- US09997563B2 Logic chip including embedded magnetic tunnel junctions 公开/授权日:2018-06-12
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