Invention Application
- Patent Title: Front Opening Ring Pod
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Application No.: US15673030Application Date: 2017-08-09
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Publication No.: US20180019142A1Publication Date: 2018-01-18
- Inventor: Scott Wong , Damon Tyrone Genetti , Derek John Witkowicki , Alex Paterson , Richard H. Gould , Austin Ngo , Marc Estoque
- Applicant: Lam Research Corporation
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/673 ; H01L21/687

Abstract:
A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.
Public/Granted literature
- US10062589B2 Front opening ring pod Public/Granted day:2018-08-28
Information query
IPC分类: