Invention Application
- Patent Title: EXHAUST APPARATUS, AND SUBSTRATE PROCESSING APPARATUS AND THIN FILM FABRICATING METHOD USING THE SAME
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Application No.: US15672063Application Date: 2017-08-08
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Publication No.: US20180057937A1Publication Date: 2018-03-01
- Inventor: Hak Joo Lee , Dae Youn Kim , Seung Wook Kim , Jin Seok Park , Jae Hyun Kim
- Applicant: ASM IP Holding B.V.
- Priority: KR10-2016-0108380 20160825
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455
Abstract:
An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.
Public/Granted literature
Information query
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