公开(公告)号：US10364493B2

公开(公告)日：2019-07-30

申请号：US15672063

申请日：2017-08-08

Applicant: ASM IP Holding B.V.

Inventor： Hak Joo Lee ,  Dae Youn Kim ,  Seung Wook Kim ,  Jin Seok Park ,  Jae Hyun Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/34 ,  H01J37/32

Abstract: An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.

公开(公告)号：US20190062907A1

公开(公告)日：2019-02-28

申请号：US16039817

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  Ju Il Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/458 ,  C23C16/455

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

公开(公告)号：US20240263304A1

公开(公告)日：2024-08-08

申请号：US18638154

申请日：2024-04-17

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  Ju Ill Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01J37/32

CPC classification number: C23C16/4411 ,  C23C16/45565 ,  C23C16/45572 ,  H01J37/32522 ,  C23C16/45551 ,  C23C16/4586 ,  H01J37/32082

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

公开(公告)号：US11993843B2

公开(公告)日：2024-05-28

申请号：US16039817

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  JuIll Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01J37/32

CPC classification number: C23C16/4411 ,  C23C16/45565 ,  C23C16/45572 ,  H01J37/32522 ,  C23C16/45551 ,  C23C16/4586 ,  H01J37/32082

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

公开(公告)号：USD876504S1

公开(公告)日：2020-02-25

申请号：US29604101

申请日：2017-05-15

Applicant: ASM IP Holding B.V.

Designer： Julll Lee ,  Sung Hoon Jun ,  Dong Rak Jung ,  Seung Wook Kim

公开(公告)号：US20180057937A1

公开(公告)日：2018-03-01

申请号：US15672063

申请日：2017-08-08

Applicant: ASM IP Holding B.V.

Inventor： Hak Joo Lee ,  Dae Youn Kim ,  Seung Wook Kim ,  Jin Seok Park ,  Jae Hyun Kim

IPC: C23C16/44 ,  C23C16/455

CPC classification number: C23C16/4412 ,  C23C16/345 ,  C23C16/455 ,  C23C16/4554 ,  C23C16/45544 ,  C23C16/45561 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32834

Abstract: An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.