Invention Application
- Patent Title: HIGH PLANARIZATION EFFICIENCY CHEMICAL MECHANICAL POLISHING PADS AND METHODS OF MAKING
-
Application No.: US15264056Application Date: 2016-09-13
-
Publication No.: US20180071888A1Publication Date: 2018-03-15
- Inventor: Jonathan G. Weis , George C. Jacob , Bhawesh Kumar , Sarah E. Mastroianni , Wenjun Xu , Nan-Rong Chiou , Mohammad T. Islam
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc. , Dow Global Technologies LLC
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B53/017

Abstract:
A chemical mechanical polishing pad for polishing a semiconductor substrate is provided containing a polishing layer that comprises a polyurethane reaction product of a reaction mixture comprising a curative and a polyisocyanate prepolymer having an unreacted isocyanate (NCO) concentration of from 8.3 to 9.8 wt. % and formed from a polyol blend of polypropylene glycol (PPG) and polytetramethylene ether glycol (PTMEG) and containing a hydrophilic portion of polyethylene glycol or ethylene oxide repeat units, a toluene diisocyanate, and one or more isocyanate extenders, wherein the polyurethane reaction product exhibits a wet Shore D hardness of from 10 to 20% less than the Shore D hardness of the dry polyurethane reaction product.
Public/Granted literature
- US10086494B2 High planarization efficiency chemical mechanical polishing pads and methods of making Public/Granted day:2018-10-02
Information query