Invention Application
- Patent Title: HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL
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Application No.: US15703666Application Date: 2017-09-13
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Publication No.: US20180082866A1Publication Date: 2018-03-22
- Inventor: Kaushik ALAYAVALLI , Ajit BALAKRISHNA , Sanjeev BALUJA , Amit Kumar BANSAL , Matthew James BUSCHE , Juan Carlos ROCHA-ALVAREZ , Swaminathan T. SRINIVASAN , Tejas ULAVI , Jianhua ZHOU
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
Implementations of the disclosure generally relate to a semiconductor processing chamber and, more specifically, a heated support pedestal for a semiconductor processing chamber. In one implementation, a pedestal assembly is disclosed and includes a substrate support comprising a dielectric material and having a support surface for receiving a substrate, a resistive heater encapsulated within the substrate support, a hollow shaft coupled to a support member of the substrate support at a first end of the shaft, and a thermally conductive material disposed at an interface between the support member and the first end of the shaft.
Public/Granted literature
- US10910238B2 Heater pedestal assembly for wide range temperature control Public/Granted day:2021-02-02
Information query
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