Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS
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Application No.: US15840636Application Date: 2017-12-13
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Publication No.: US20180174806A1Publication Date: 2018-06-21
- Inventor: Kazuya NAGASEKI , Shinji HIMORI , Mitsunori OHATA
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2016-243451 20161215
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67

Abstract:
Disclosed is a plasma processing apparatus including: a processing container; a placing table provided in the processing container and configured to place a workpiece thereon; a dielectric member having a facing surface that faces the placing table; a planar antenna provided on a surface of the dielectric member opposite to the facing surface and configured to introduce an induced electric field for plasma excitation into the processing container via the dielectric member; and an electromagnet group disposed along an outer circumference of the processing container and configured to form a magnetic field for moving ions in plasma based on the induced electric field along the facing surface of the dielectric member in the processing container.
Public/Granted literature
- US10825663B2 Plasma processing apparatus Public/Granted day:2020-11-03
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