Invention Application
- Patent Title: MICROWAVE GENERATORS AND MANUFACTURE OF SYNTHETIC DIAMOND MATERIAL
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Application No.: US15745751Application Date: 2016-08-22
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Publication No.: US20180218881A1Publication Date: 2018-08-02
- Inventor: JOHN ROBERT BRANDON , NEIL PERKINS
- Applicant: ELEMENT SIX TECHNOLOGIES LIMITED
- Applicant Address: GB DIDCOT, OXFORDSHIRE
- Assignee: ELEMENT SIX TECHNOLOGIES LIMITED
- Current Assignee: ELEMENT SIX TECHNOLOGIES LIMITED
- Current Assignee Address: GB DIDCOT, OXFORDSHIRE
- Priority: GB1514998.2 20150824
- International Application: PCT/EP2016/069785 WO 20160822
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/244 ; C23C16/511 ; C23C16/27

Abstract:
A microwave generator system for use in a microwave plasma enhanced chemical vapour deposition (MPECVD) system, the microwave generator system comprising: a microwave generator unit configured to produce microwaves at an operating power output suitable for fabricating synthetic diamond material via a chemical vapour deposition process; a fault detection system configured to detect a fault in the microwave generator unit which results in a reduction in the operating power output or a change in frequency; and a re-start system configured to restart the microwave generator unit in response to a fault being detected and recover the operating power output or frequency in a time period of less than 10 seconds after the fault in the microwave generator unit which caused the reduction in the operating power output or the change in frequency.
Public/Granted literature
- US10707062B2 Microwave generators and manufacture of synthetic diamond material Public/Granted day:2020-07-07
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