- 专利标题: SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
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申请号: US15956297申请日: 2018-04-18
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公开(公告)号: US20180240687A1公开(公告)日: 2018-08-23
- 发明人: Hideaki TANAKA
- 申请人: EBARA CORPORATION
- 优先权: JP2012-181670 20120820
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/02 ; B08B1/04 ; A46B13/00 ; B08B1/00 ; A46B15/00
摘要:
A substrate cleaning apparatus for performing scrub cleaning of a surface of a substrate by rotating both of the substrate and a roll cleaning member while keeping the roll cleaning member in contact with the surface. The apparatus includes a roll holder configured to support and rotate a roll cleaning member, a vertical movement mechanism, having a vertically movable unit vertically movable by actuating an actuator having a regulating device, configured to vertically move the roll holder coupled to the vertically movable unit so the roll cleaning member applies a roll load to the substrate W while cleaning the substrate. A load cell provided between the vertically movable unit of the vertical movement mechanism and the roll holder is configured to measure the roll load. A controller is configured to perform feedback control of the roll load through the regulating device based on a measured value of the load cell.
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