SEGMENTED GUARD-RING AND CHIP EDGE SEALS
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
Public/Granted literature
Information query
Patent Agency Ranking
0/0