Invention Application
- Patent Title: SEGMENTED GUARD-RING AND CHIP EDGE SEALS
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Application No.: US15443276Application Date: 2017-02-27
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Publication No.: US20180248001A1Publication Date: 2018-08-30
- Inventor: Anthony K. STAMPER , Vincent J. MCGAHAY , Zhong-Xiang HE
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/31 ; H01L23/528

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
Public/Granted literature
- US10062748B1 Segmented guard-ring and chip edge seals Public/Granted day:2018-08-28
Information query
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