Invention Application
- Patent Title: HEAT TREATMENT VESSEL FOR SINGLE-CRYSTAL SILICON CARBIDE SUBSTRATE AND ETCHING METHOD
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Application No.: US15766191Application Date: 2016-10-06
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Publication No.: US20180301359A1Publication Date: 2018-10-18
- Inventor: Satoshi Torimi , Masato Shinohara , Norihito Yabuki , Satoru Nogami
- Applicant: Toyo Tanso Co., Ltd.
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: Toyo Tanso Co., Ltd.
- Current Assignee: Toyo Tanso Co., Ltd.
- Current Assignee Address: JP Osaka-shi, Osaka
- Priority: JP2015-198143 20151006
- International Application: PCT/JP2016/004505 WO 20161006
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/3065 ; H01L21/04 ; H01L21/687

Abstract:
A heat treatment container (1) is provided with support members (6) for supporting a disc-shaped SiC substrate (2), which is an object, at a time of an etching treatment of the SiC substrate (2). Each of the support members (6) has an inclined surface (6F) for supporting a lower surface end (2E) of the SiC substrate (2), the inclined surface being inclined so as to increasingly approach the centerline of the SiC substrate (2) going downward. More specifically, each of the support members (6) is formed in a conical shape with a diameter that increases going downward, and a conical surface which is the peripheral surface of each supporting member forms the inclined surface (6F). A vertically-middle section of the inclined surface (6F) contacts the lower surface end (2E) of the SiC substrate (2).
Public/Granted literature
- US10665485B2 Heat treatment vessel for single-crystal silicon carbide substrate and etching method Public/Granted day:2020-05-26
Information query
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