Invention Application
- Patent Title: Combination Vacuum And Over-Pressure Process Chamber And Methods Related Thereto
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Application No.: US15919169Application Date: 2018-03-12
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Publication No.: US20180308732A1Publication Date: 2018-10-25
- Inventor: WILLIAM MOFFAT , CRAIG WALTER MCCOY
- Applicant: YIELD ENGINEERING SYSTEMS, INC.
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67 ; H01L21/02 ; F27D5/00 ; F27D1/18
Abstract:
A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.
Information query
IPC分类:
